1 thought on “The amazing MEMS inventor”

  1. A pool of ink stains in 2019 The winner of the IEEE Honorary Medal, Kurd Peterston, opened the door to a lifetime research miniature device.
    In 1975, Kurt Petersen was also a young and smart researcher. At that time, he had just obtained a PhD in electrical engineering at Massachusetts Institute of Technology in MIT. Research center work. He is a member of the central optical research team. However, he often felt very boring. One day, he strolled in a huge building complex, and then found a large piece of black stains on the oily tile of an ordinary corridor. It is the stain that changes his life and the entire industry.
    In order to find the source of stains (he was also free), Peter Sen walked into the recent laboratory. In the end, he discovered that this stain was formed by the overflowing ink. This is a laboratory that develops inkjet printer nozzles. During the research and development process, it is necessary to punch punching on silicon materials.
    This on silicon materials? Peter Sen has never heard of it, but he remembered an advertisement about the silicon -based micro accelerator he had seen before. Suddenly, a larger scene appeared in his mind: people are actually making micro -mechanical accessories. Various components are only a few microns, which are made of silicon materials. Today, we call this type of device a microcomputer and electrical system (MEMS). Peterson also wants to make MEMS.
    So he opened a new career path -specializing in MEMS technology, including the current use of mailing letters in the United States to prevent anthracnosecochemicals to prevent anthracnobacter bacteria and create MEMS companies. It is precisely because of the contribution in this area that Peterson won the IEEE Medal in 2019.
    The shortly after discovering the ink stain, Peter Sen started to read all the information about the use of silicon materials to manufacture micro -mechanical devices, including various journals and magazines, such as "IEEE on Electron" (IEEE on Electron " Devices), App Lied Physics Letters, and "Journal of the Society". At that time, there were no specific names in such devices, and there were only several MEMS products on the market. He found "Many people around the world have made different mechanical devices with silicon, but they have not yet formed related groups. Most people who study such devices do not understand each other."
    and then Peter Sen started to start to start to start Beginned to create his first device. Looking at the inkjet printer nozzles in the microscope, he said: "If there are defects, I can see at a glance. There are some small, independent and very fine silicon pillars under the microscope. The structure may be moved around. They may turn the light, and I can make a lighting device. "His research and development process is similar to the manufacturing process of today's MEMS. First of all Sacrifice layer erosion. In the end, there are only silicon cantilever, and the top is a thin metal layer.
    3 months he spent three months to create several miniature regulators. Each regulator is about 100 microns in length and about 0.5 microns thick. He brought these regulators to a laboratory with IBM scanning electron microscope, where technical staff there helped him settle the wires, and then he connected the power to these devices to observe their operation.
    "She is all fascinated." Peter Sen recalled, "She said that she had never seen a device running under a microscope."
    Later, Peter Sen spent another 5 years and used silicon materials to make There are as many micro -mechanical devices as possible, including accelerators and electronic switches. He left the optical research team and entered a special customized laboratory, and could only accommodate him and an intern.
    Che Peterson wrote an internal report on emerging technologies based on the in -depth study of the literature and his work. "Many mechanical structures may be valuable for IBM." He said, for example, the reading and writing header of optical and mechanical disk drives and a more complex inkjet printer nozzle, but IBM is not interested.
    Peterson is disappointed, but he also realizes that such devices do not belong to the key business of IBM. So he modified the report, deleted IBM proprietary information, and submitted it to the IEEE Association, which filled the 50 -page layout of the entire meeting. The article entitled "Silicon as a MateriAl", which became a cover article in May 1982, making MEMS a separate technical branch.
    The content involved in this paper is very comprehensive, and the mechanical properties of integrated circuit materials and various ways to etch such materials into the corresponding shapes and structures are discussed. "The article has inferred the possible things that may occur in the future, such as deep -reacting ion etching (DRIE), which has brought thoroughly changing to the field." He said, "Even today, many people say to me say to me. It was that article that made them have a strong interest in MEMS. "
    " We have read this article when reading graduate students. " Greg Kovacs said the research institute is located in Monel Parker, California, USA. "He has played a huge role in the field of MEMS. The work he has done is more important than creating this field, and he has promoted the development of this field. As far as me, he is a superhero."
    " Once the IEEE Society's paper was published, Peter Sen was invited to speak at a meeting from all over the world, and the researchers came to Almaden to see the author's respect. "People who do all kinds of crazy research will contact me in some way, such as researchers in low -temperature cold device in micro -flowing body." He said. He seemed to become the head of MEMS technology overnight.
    The field has been steadily developing in the 1980s. When Peton's paper was published, about thirty or forty people around the world were studying this technology. By 1990, he estimated that there were about 600 people who studied this technology. The market appears in the market for the pressure sensor for disposable blood pressure monitors and new fuel control carburetor. The aerospace industry has also begun to use MEMS -based accelerators. The first micro -mechanical inkjet printer prints the nozzle to enter mass production. At that time, many startups appeared, and they desire to develop with this technology. Peter Sen said that in 1987, the National Science Foundation seminar was officially named.
    I did not expect, and several companies contacted Peter Sen. In the end, he accepted the invitation and jointly established Devices with Jim Knutti in 1982 to develop and manufacture the MEMS device.
    He recalled that the abandonment of the stable research work in the enterprise made him feel "nervous". He has two young sons, so economic security is important. About $ 1 million in entrepreneurial funds finally came from oil investors from other states, not Silicon Valley investors. "At that time, there were some startups in Silicon Valley, but it was not like today. At that time, funding was very difficult." He said.
    . Their team later moved to a 280 -square -meter laboratory in Feli Mont, California, and built some of its own equipment, including chip keys for packaging and protecting silicon wafers. They signed a contract with a large company to produce samples, including the kind of light transferler made by Peter Sen in IBM. At the same time, they began to develop their MEMS devices.
    "We demonstrated a lot of devices at the time," Peter Sen said, "but none of them were put into production." Once, a tire pressure sensor used in the truck transportation industry was almost successful, but the one who cooperated with them was the one who cooperated with them. The supervisor died. Peterson believes that it is because they lack manufacturing experience because they and Kuesti are not able to achieve commercialization.
    The contract production allows the company to run stable, but Peterson still hopes to push its MEMS device to the market. He believes it is time to establish a second company.
    In 1985, Peterson and Joseph Mallon, Janusz Bryzek, and Joseph Mallon. Essence Berizk had previously held two companies that developed MEMS pressure sensors with others. "Jonkoski and his partners have production and manufacturing experience," and this is what the company lacks, Peter Sen said.
    In after the establishment, starting three kinds of pressure sensors: one for the aerospace industry, the other for the oil industry, and the other is high -temperature pressure sensors that do not target the specific market. It turns out that the last one has achieved the greatest success, and even the tire of the spacecraft uses this pressure sensor. "We found a way to use the MEMS process to isolate the resistor from the matrix. We bonded the single crystal silicon wafer on the silicon oxide chip with a pressure sensor film, and then carved out most of the upper silicon wafers. Only retain the resistor, "Peter Sen said. He believes that this sensor is the first silicon crystal insulation device, which has been widely used since then.
    In 1991, Lucas Industrial Co., Ltd. acquired, which made Peter Sen among the "MEMS Millionaire". The company's production line is now sold by Afino.
    In the next few years, the shareholding shares held by Peterson continued to increase. In the meantime, he focused on melting combination. This process needs to etch on the chips of two different modes, and then connect the two together. This process can make very complicated devices, such as gyroscope. His business card has always been printed with photos of the first equipment made of this process.
    When Peter Sen left in 1995, the MEMS pressure sensor has been widely used in a variety of systems, including diving equipment and HVAC control system, and MEMS accelerators have just begun to use the collision perception system in automotive airbags.
    Wh Peterson did not make any arrangements when he left the company. A researcher Allen Northrup, a researcher at the National Laboratory of Lawrence Lifomor National Laboratory, suggested to him that the MEMS device can greatly accelerate the polymerase chain reaction (PCR). The method of copying DNA sequences.
    The friend of Peter's wife, Bill McMillan, who works in the field of biotechnology, confirmed the development prospect of PCR. Subsequently, Peter Sen began to formulate a plan to reduce PCR machinery volume and cost. The goal was to create handheld equipment that doctors could use in the office.
    This and McMilun's white magnolia coffee shop in Palo Alto have lunch. "I introduced him about my thoughts, and he began to depict the business plan on the paper pad." Peter Sen said. He still keeps that dinner cushion.
    The papers published by Peterson in 1982 imply that the possibility of deep reactive ion etching. Compared with the traditional chip production process, this technology can engrave deeper holes and grooves in silicon materials. He began to apply deep -reactive ions to the micro -flow chip, and sent the microblog liquid into the accurate channel.
    "We had an idea at the time that we could use MEMS technology and micro -flow body to quickly heated and cool samples to make PCR devices with small but fast response, so that doctors can use it in the office for diagnosis." Peter Sensen Say.
    In order to realize the commercialization of technology, Peterson co -founded CEPHEID with others in 1996 and obtained basic technologies from Lawrence Livermore National Laboratory. By 1997, the company had raised $ 3.2 million in funds from the US Department of Defense. The first device developed by CEPHEID is Smart Cycler. It uses the MEMS structure to achieve the rapid heating and cooling of a few micro -liquid liquids, while using fluorescent sensors to monitor the progress. It is not a handheld device, but this is not a problem. More importantly, it enables the PCR process to automate.
    CEPHEID's second product is Genexpert, which aims to further simplify PCR. It can automatically extract DNA from the biological sample and then add the reagents required for the test.
    The company was listed in 2000, when the technology bubble was burst. Before the market shrinks, "we are one of the last batch of successful IPO companies." Peter Sen said.
    In public offering of stocks, the company has received enough funds, and the team puts Smart Cycler into production. When the summer was coming to an end in the summer of 2001, the company had completed the delivery of 80 sets of equipment. After the first prototype was generated in December 2001, Genexpert's research and development work is still gradually advancing.
    In a anthrax terrorist attack occurred in the United States. In late and October 2001, letters with anthracnose spores were mailed to members of the US news media and the US Senate, which eventually caused more than 20 people to infection and 5 people were killed.
    At the time, Cepheid had determined that its technology could quickly detect anthracnose bacteria, so it became famous overnight. "We and Dr. Sanjay Gupta conducted on -site PCR tests through the" Good Morning American "program and the United States Cable TV News Network. Peter Sen recalled.
    Them postal department is worried that there will be a biological attack that will be carried in the future. Cepheid's device passed the test in December 2001. "It was perfect at the time." Peter Sen said.
    Che additional tests, the company cooperated with the Nosro Purgurman company to develop a PCR biosensor, which can easily connect to the email sorter. This product pushed to the market in 2003. Today, all the letters in the United States still have to screen anthrax through the CEPHEID machine, Peter Sen said. The company's system is now mainly used for linking medical diagnosis such as Chain Bacteria, Novak virus, influenza, and chlamydia. The company sold more than 20 tests approved by the US Food and Drug Administration and applied to CEPHEID machines.
    In 2003, Peter Sen had prepared for the new chapter of opening a career. This time, he wants to develop a silicon resonator, which can generate a constant frequency and can be used for accurate time. "When IBM, I created some of the first batch of MEMS resonators, but it was not ideal. They could not be comparable to the quartz crystal oscillator," he said.
    Tom Kenny, Markus Lutz, and Aaron PARTRIDGE have made a better solution. "They use single crystal silicon to make a resonant, which is the most perfect material in the world." Peter Sen said, "Polycrystalline materials will generate tiny shifts in the crystal world when they are under pressure. Two atoms generate displacement, which will also cause changes in mechanical properties. "Single -silicon will not change over time, but its resonance frequency will change with temperature changes. Therefore, the difficulty is how to solve the problem of temperature dependence. Essence
    Peterson, Kenny, Ruz, Patrick, and Joe Brown (Joe Brown, Peter Sen's colleagues in IBM have worked with him with two companies) again at the White Magnolia Cafe A common meal and drafted a business plan on the paper cushion again. Robert Bosch Co., Ltd. has some core intellectual property rights, so in addition to attracting investors, Peter Sen must also persuade Bosch's executives in Germany to obtain technical permission.
    "In Stuttgart, I held a large -scale meeting with their board of directors." He said, "I tell them, 'What I do is. I founded the company. Anthuria screening. 'Their board not only agreed with the technical permission, but also made major investment in our company. "
    S new company Sitime was founded in December 2004. The goal is to put the billions of dollars used in the time industry for billions of dollars. The material changes from quartz to silicon. The company's first resonator was delivered in 2007. Today, the company's MEMS oscillator is widely used in the timing system of mobile devices and other electronic instruments.
    In 2008, when Sitime was well operated, Peter Sen proposed another entrepreneurial idea to him at McMaren, one of the partners of CEPHEID: developing an implantable continuous blood glucose monitor. "People have worked for 30 years, but no one has succeeded," Peter Sen said. Once the sensor is implanted in the body, "the body will use collagen to isolate it, and the hemoglycemia will be prevented from contacting the sensor." He explained.
    therefore, McMaren cooperated with Natalie, a researcher at Duke University Natalie, and proposed a solution: using structured hydrogel to avoid foreign body reactions and use fluorescence with fluorescence The way to read the blood glucose concentration. Peterson used the optical knowledge he had learned before providing help to the development of the product and stayed in the startup PROFUSA for a year. This company now has about 30 employees, with a total funds of $ 100 million.
    Peterson said that operating the company will become his last full -time job. "I just don't want to continue to deal with the company's daily business. I started to invest in angel, which is more interesting."
    The could not resist the temptation of another team. Two students from Berkeley have developed MEMS resonator -related technologies, but have been suffering from being unable to achieve the commercialization of the technology. Peterson and K.G. Ganapathi (K.G. Ganapathi) joined the company's company. After that, the company was renamed Verreon, and Peter Sen served as the company's chief technology officer to help coordinate the company's sales of Qualcomm in 2010.
    This is the third time Peterson has served as chief technology officer or similar position. Among all his startups, he only served as CEO at Sitime. "When in the company, the other two wanted to be the chairman." Roger Grace, the company's marketing consultant, said, "Kult doesn't care, he is the chief technician. He is not a self -righteous person. "
    " In the field of MEMS, people praise Kurite, he is very kind, considerate, and helpful. "Grace said," There are many smart people, but he is unique. He is humble. He is very humble. . Getting along with him, you will feel relaxed. "
    Ghanapati also agreed:" It is rare to be as successful as Kurite and is loved by everyone. "
    At present, Peter Sen, Peter Sen, Back to the great cause of angel investment, his investment goal is MEMS, medical equipment and biotechnology fields. He said that there are about 70 companies he invested, nearly half of which have been successful, and the return on investment is 350%. This record is excellent, because a recent study shows that in general, the long -term investment scope is widely speaking for a long time. Angel investor's return on investment is 250%.
    "He seems to have a mysterious power that can detect products with prospects for development. A product takes 3 years or 15 years to succeed, but he has a keen sense of smell in this regard." Ganapati said Essence
    In 2012, Peterson joined the Silicon Valley Angel Investment Gang. This is an invitation system. About 200 investors will meet regularly to understand and share information. Now, he is the person in charge of the hardware branch of the organization. At the same time, he is also a director of the two companies and as a consultant in dozens of other companies. He meets several people who come to consult every day and contact companies in the coastal regions of Canada and the eastern coast of the United States.
    Peterson is 71 years old this year, but he does not mean to retire. "Entrepreneurs are energetic, motivated and ambitious, and dealing with them is a joy." He said.
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